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725501 Sigma-Aldrich

Bis(methyl-η5−cyclopentadienyl)dimethylhafnium

packaged for use in deposition systems

Synonym: HFCMME, HfD-CO2

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Properties

form   waxy solid
reaction suitability   core: hafnium
color   white
bp   80-120 °C/0.3-0.5 mmHg (lit.)
mp   60 °C (lit.)
density   1.60 g/mL±0.01 g/mL at 25 °C
SMILES string   C[Hf]C.C[C]1[CH][CH][CH][CH]1.C[C]2[CH][CH][CH][CH]2
InChI   1S/2C6H7.2CH3.Hf/c2*1-6-4-2-3-5-6;;;/h2*2-5H,1H3;2*1H3;
InChI key   BSTQZSKPQICLPX-UHFFFAOYSA-N

Description

General description

Atomic number of base material: 72 Hafnium

Application

Precursors Packaged for Depositions Systems

Packaging

10 g in stainless steel cylinder

Features and Benefits

Compatible with a variety of oxidants in ALD growth processes across a wide temperature range exhibiting self limiting growth up to 400 °C. Precursor volatility and thermal stability properties enable easy materials transport from bubblers into conventional deposition tools.

Packaging

Packaged in stainless steel cylinders compatible with conventional deposition systems. Precursors may be used in liquid injection systems as dilute solutions and in combination with a variety of other sources to deposit mixed oxides.

Safety & Documentation

Safety Information

Symbol 
GHS07  GHS07
Signal word 
Warning
Hazard statements 
Precautionary statements 
RIDADR 
NONH for all modes of transport
WGK Germany 
3

Frequently Asked Questions

Which document(s) contains shelf-life or expiration date information for a given product?
If available for a given product, the recommended re-test date or the expiration date can be found on the Certificate of Analysis.
How do I get lot-specific information or a Certificate of Analysis?
The lot specific COA document can be found by entering the lot number above under the "Documents" section.
How do I find price and availability?
There are several ways to find pricing and availability for our products. Once you log onto our website, you will find the price and availability displayed on the product detail page. You can contact any of our Customer Sales and Service offices to receive a quote. USA customers: 1-800-325-3010 or view local office numbers.
What is the Department of Transportation shipping information for this product?
Transportation information can be found in Section 14 of the product's (M)SDS.To access the shipping information for this material, use the link on the product detail page for the product.
Can the empty deposition cylinders be refilled?
Yes, we are able to refill these cylinders through our SAFC Hitech group. Please contact our Technical Service department by emailat techserv@sial.com, and they will forward you to the appropriate SAFC Hitech representative for a quote.
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Protocols & Articles

Articles

ALD — A Versatile Tool for Nanostructuring

The acronym ALD stands for atomic layer deposition. Although the process was developed during the 1970s, ALD remained more of a niche process, since initially most applications of this technique were...
Mato Knez
Material Matters 2008, 3.2, 28
Keywords: Adsorption, Applications, Atomic layer deposition, Chemical vapor deposition, Deposition, Diffusion, Electronics, Environmental, Material Matters, Methods, Nanomaterials, Nanotechnology, Nanotubes, PAGE, Reductions, Support, Thin film deposition, Tissue microarrays

High Purity Metalorganic Precursors for CPV Device Fabrication

Thin film photovoltaic devices have become increasingly important in efficiently harnessing solar energy to meet consumer demand. Conventional crystalline silicon solar cells have demonstrated remark...
Ravi Kanjolia
Material Matters Volume 5 Article 4
Keywords: Absorption, Chemical vapor deposition, Degradations, Deposition, Mass spectrometry, Nuclear magnetic resonance spectroscopy, Purification, Semiconductor, Solar cells, Spectroscopy, Tissue microarrays, Vaporization

The Savannah ALD System - An Excellent Tool for Atomic Layer Deposition

Atomic Layer Deposition (ALD) is a coating technology that allows perfectly conformal deposition onto complex 3D surfaces. The reason for this uniform coating lies in the saturative chemisorption of ...
Dr. Douwe Monsma, Dr. Jill Becker
Material Matters 2006, 1.3, 5.
Keywords: Applications, Atomic layer deposition, Automotive, Catalysis, Ceramics, Chemical vapor deposition, Deposition, Electronics, Infrared spectroscopy, Ion Exchange, Nanomaterials, Semiconductor, Solar cells, Tissue microarrays

Related Content

ALD Cylinders for Pyrophoric Precursors [VIDEO]

Our Material Science portfolio offers a variety of precursor materials for use in Atomic Layer Deposition, or ALD. ALD uses consecutive, self-limiting reactions to deposit thin films of controlled th...
Keywords: Atomic layer deposition, Deposition, Materials Science

Peer-Reviewed Papers
15

References

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