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760404

Tantalum(V) ethoxide

packaged for use in deposition systems

Synonym: PET, Pentaethoxytantalum, Pentaethyl tantalate, Tantalum pentaethoxide

  • CAS Number 6074-84-6

  • Linear Formula Ta(OC2H5)5

  • Molecular Weight 406.25

  •  Beilstein/REAXYS Number 3678999

  •  EC Number 228-010-2

  •  MDL number MFCD00049785

  •  PubChem Substance ID 329766860

  •  NACRES NA.23

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Properties

Related Categories 73: Tantalum, CVD and ALD Precursors Packaged for Deposition Systems, CVD and ALD Precursors by Metal, Materials Science, Micro/NanoElectronics,
form   liquid
refractive index   n20/D 1.487 (lit.)
bp   155 °C/0.01 mmHg (lit.)
mp   21 °C (lit.)
density   1.566 g/mL at 25 °C (lit.)
SMILES string   CCO[Ta](OCC)(OCC)(OCC)OCC
InChI   1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5
InChI key   HSXKFDGTKKAEHL-UHFFFAOYSA-N

Description

Application

Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods

Packaging

25 g in stainless steel cylinder

Safety & Documentation

Safety Information

Symbol 
Signal word 
Danger
Hazard statements 
Precautionary statements 
RIDADR 
UN 2920 3(8) / PGII
WGK Germany 
WGK 3
Flash Point(F) 
84.2 °F - closed cup
Flash Point(C) 
29 °C - closed cup
Protocols & Articles
Peer-Reviewed Papers
15

References

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