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901482 Sigma-Aldrich

Hexamethyldisilazane

20% solution in xylene

Synonym: HMDS

  • CAS Number 999-97-3

  • Linear Formula C6H19NSi2

  •  NACRES NA.23

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Description

General description

The product is used to augment the adhesion of photoresist on silicon and SiO2 surfaces.
The effectiveness of HMDS on adhesion is correlated with the reactivity of this compound with surface hydroxyl groups to form a new siloxane end product, i.e. Si-O-Si(CH3)3. This newly formed termination on the substrate renders the surface more hydrophobic in character and leads to greater wettability by photoresist. The latter condition is a crucial factor in good bonding. As a result of these altered characteristics due to the surface chemistry, the treated silicon surfaces become highly compatible with both negative and positive photoresists.

Application

HMDS preparations are generally applied to the silicon wafer while spinning, prior to the application of photoresist. As an alternative procedure, the wafers may be immersed in HMDS preparations and allowed to dry after removal.

Features and Benefits

• Ready-to-use preparations for surface treatment of silicon.
• Promotes photoresist adhesion on silicon and SiO2 films.
• Prevents lift-off at edges of photoresist and reduces undercutting.
• Ensures full-line resolution.
• Improves yields of MOS and integrated silicon devices.

Safety & Documentation

Safety Information

Symbol 
Signal word 
Danger
Target organs 
hearing organs, Respiratory system
RIDADR 
UN 1992 6.1(3) / PGII
WGK Germany 
WGK 2
Flash Point(F) 
76.1 °F
Flash Point(C) 
24.5 °C

Documents

Certificate of Analysis (COA)

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Protocols & Articles
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