Silicone (polysiloxane) polymers can be classified as fluids, elastomers, and resins. Polymers of moderate molecular weight are fluids, while high molecular weight, slightly cross-linked polymers are elastomeric. Low molecular weight resins contain functional groups, usually hydroxyl, alkoxy, or chloro groups that undergo hydrolysis and/or condensation to form highly cross-linked structures. Silicones have excellent thermal stability, water repellency, and electrical insulation properties. Patterned stamps prepared from elastomeric poly(dimethylsiloxane) (PDMS) are used extensively for soft-lithography in Lithography/Nanopattering applications.