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725528

Tetrakis(ethylmethylamido)zirconium(IV)

packaged for use in deposition systems

Synonym(s):

TEMAZ, Tetrakis(ethylmethylamino)zirconium(IV)

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About This Item

Linear Formula:
Zr(NCH3C2H5)4
CAS Number:
175923-04-3
Molecular Weight:
323.63
NACRES:
NA.23
PubChem Substance ID:
329764166
UNSPSC Code:
12352103
MDL number:
MFCD03427131
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form

liquid

reaction suitability

core: zirconium, reagent type: catalyst

bp

81 °C/0.1 mmHg (lit.)

density

1.049 g/mL at 25 °C (lit.)

SMILES string

CCN(C)[Zr](N(C)CC)(N(C)CC)N(C)CC

InChI

1S/4C3H8N.Zr/c4*1-3-4-2;/h4*3H2,1-2H3;/q4*-1;+4

InChI key

SRLSISLWUNZOOB-UHFFFAOYSA-N

General description

Atomic number of base material: 40 Zirconium

Application

Precursors Packaged for Depositions Systems

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Signal Word

Danger

Target Organs

Respiratory system

Storage Class

4.3 - Hazardous materials which set free flammable gases upon contact with water

Hazard Classifications

Acute Tox. 4 Oral - Eye Dam. 1 - Flam. Liq. 2 - Skin Corr. 1A - STOT SE 3 - Water-react. 1

Flash Point (°F)

58.1 °F - closed cup

Flash Point (°C)

14.5 °C - closed cup

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