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760412
Niobium(V) ethoxide
packaged for use in deposition systems
Synonym(s):
NbOEt, Niobium ethanolate, Niobium ethylate, Niobium pentaethoxide, Pentaethoxyniobium
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About This Item
Linear Formula:
Nb(OCH2CH3)5
CAS Number:
Molecular Weight:
318.21
EC Number:
221-795-2
UNSPSC Code:
12352103
PubChem Substance ID:
Beilstein/REAXYS Number:
3678883
MDL number:
assay
96.5-103.5% (gravimetric), 99.999% (trace metals analysis)
form
liquid
reaction suitability
core: niobium
refractive index
n20/D 1.516 (lit.)
bp
142 °C/0.1 mmHg (lit.)
mp
5-6 °C (lit.)
density
1.268 g/mL at 25 °C (lit.)
SMILES string
CCO[Nb](OCC)(OCC)(OCC)OCC
InChI
1S/5C2H5O.Nb/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5
InChI key
ZTILUDNICMILKJ-UHFFFAOYSA-N
General description
Niobium(V) ethoxide is a colorless liquid that is miscible with some organic solvents, but which hydrolyzes readily. Niobium(V) ethoxide boils at 142 °C at 0.1 mmHg.
Application
Niobium ethoxide is an important precursor for depositing thin films of niobium oxide and other thin films doped with niobium.[1] Because of its low boiling point and low decomposition temperature (~325-350 °C), niobium(V) ethoxide is used as a precursor in atomic-layer deposition (ALD)[2], chemical vapor deposition (CVD)[3], and metal-organic chemical vapor deposition (MOCVD) of niobium oxides.
Features and Benefits
Niobium(V) ethoxide packaged for use in deposition systems is packaged in a SWAGELOK stainless-steel deposition system convenient for connecting to ALD, CVD, and MOCVD systems.
- Steel cylinder connected to 316 stainless steel ball-valve
- 1/4 inch male SWAGELOK VCR connections
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signalword
Warning
hcodes
Hazard Classifications
Flam. Liq. 3
Storage Class
3 - Flammable liquids
wgk
WGK 3
flash_point_f
96.8 °F - closed cup
flash_point_c
36 °C - closed cup
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