Visible and near-infrared planar waveguide structure of polycrystalline zinc sulfide from C ions implantation.

We report the fabrication of a planar waveguide in polycrystalline zinc sulfide by 6.0 MeV C ions implantation with a fluence of 5 × 10¹⁴ ion/cm² at room temperature. The near-field light intensity profiles in the visible and near-infrared bands are measured by the end-face coupling method with different laser sources. Investigation of the Raman spectra demonstrates that the microstructure of the polycrystalline zinc sulfide has no significant change after C ion implantation. The absorption spectra show that the implantation processes have no influence on the visible and infrared bands.