463094

Trimethylboron

electronic grade, ≥98.35%

• Synonym(s): Trimethylborane
• Linear Formula: B(CH₃)₃
• CAS Number: 593-90-8
• Molecular Weight: 55.91
• UNSPSC Code: 12352300
• PubChem Substance ID: 24869894
• EC Number: 209-816-3
• MDL number: MFCD00058727
• eCl@ss: 32150313

Properties

• grade: electronic grade
• assay: ≥98.35%
• form: gas
• reaction suitability: core: boron
• impurities: <1 ppm Oxygen (O₂), <1.5% Dimethylethylborane [B(CH₃)₂C₂H₅], <10 ppm Carbon dioxide (CO₂), <10 ppm Nitrogen (N₂), <100 ppm Methane (CH₄), <1000 ppm Trimethylamine (TMA), <50 ppm Hydrogen (H₂)
• bp: −20.2 °C (lit.)
• mp: −161.5 °C (lit.)
• SMILES string: CB(C)C
• InChI: 1S/C3H9B/c1-4(2)3/h1-3H3
• InChI key: WXRGABKACDFXMG-UHFFFAOYSA-N

Description

Application

Trimethylboron is used as an organometallic precursor for the CVD of boron-carbon containing films and as a boron source in the deposition of borophosphosilicate glass (BPSG).

Precursor to boron carbide thin films by chemical vapor deposition (CVD).

Other Notes

Stainless steel regulators Z527416 or Z527424 are recommended.

Safety Information

• Pictograms: GHS04,GHS05
• Signal Word: Danger
• Hazard Codes: H280,H314
• Precautionary Statements: P260 - P280 - P303 + P361 + P353 - P304 + P340 + P310 - P305 + P351 + P338 - P410 + P403
• Hazard Classifications: Eye Dam. 1 - Press. Gas Liquefied gas - Skin Corr. 1B
• Storage Class: 2A - Gases
• WGK: WGK 1
• Flash Point (°F): Not applicable
• Flash Point (°C): Not applicable
• PPE (personal protective equipment): Faceshields, Gloves, Goggles, multi-purpose combination respirator cartridge (US)