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  • Effects of oxygen content on the optical properties of tantalum oxide films deposited by ion-beam sputtering.

Effects of oxygen content on the optical properties of tantalum oxide films deposited by ion-beam sputtering.

Applied optics (1985-02-15)
H Demiryont, J R Sites, K Geib
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Sigma-Aldrich
Tantal(V)-oxid, 99% trace metals basis