Real-time measurement of sub-PPM concentrations of airborne chemicals in semiconductor manufacturing.

Real-time mass spectroscopy (ICAMS) can provide hourly or daily estimates of employee exposure. Field calibration of the unit indicated essentially linear response from 0.01 (Cellosolve Acetate) and 0.03 ppm (Diglyme) to 1 ppm in semiconductor cleanrooms. The instrument can be programmed for 4 minute readings on a single compound, or for rotation among several chemicals, each requiring 4 minute dwell times for analysis. In contrast to full shift personal sampling methods to measure exposure, ICAMS offers insights into the occurrence of peak exposures. In addition, in the occupational environment ICAMS results can be integrated to estimate full-shift within a zone exposures. Thus, the ICAMS extends measurement sensitivities below those currently available and offers a viable alternative to personal sampling in the semiconductor industry.