• Home
  • Search Results
  • Efficacy of using multiple open-path Fourier transform infrared (OP-FTIR) spectrometers in an odor emission episode investigation at a semiconductor manufacturing plant.

Efficacy of using multiple open-path Fourier transform infrared (OP-FTIR) spectrometers in an odor emission episode investigation at a semiconductor manufacturing plant.

The Science of the total environment (2011-05-31)
Yung-Chieh Tsao, Chang-Fu Wu, Pao-Erh Chang, Shin-Yu Chen, Yaw-Huei Hwang
ABSTRACT

This study evaluated the efficacy of simultaneously employing three open-path Fourier transform infrared (OP-FTIR) spectrometers with 3-day consecutive monitoring, using an odor episode as an example. The corresponding monitoring paths were allocated among the possible emission sources of a semiconductor manufacturing plant and the surrounding optoelectronic and electronic-related factories, which were located in a high-tech industrial park. There was a combined total odor rate of 43.9% for the three monitoring paths, each comprised of 736 continuous 5-minute monitoring records and containing detectable odor compounds, such as ammonia, ozone, butyl acetate, and propylene glycol monomethyl ether acetate (PGMEA). The results of the logistic regression model indicated that the prevailing south wind and the OP-FTIR monitoring path closest to the emission source in down-wind direction resulted in a high efficacy for detecting odorous samples with odds ratios (OR) of 3.8 (95% confidence interval (CI): 2.9-5.0) and 5.1 (95% CI: 3.6-7.2), respectively. Meanwhile, the odds ratio for detecting ammonia odorous samples was 7.5 for Path II, which was downwind closer to the possible source, as compared to Path III, downwind far away from the possible source. PGMEA could not be monitored at Path II but could be at Path III, indicating the importance of the monitoring path and flow ejection velocities inside the stacks on the monitoring performance of OP-FTIR. Besides, an odds ratio of 5.1 for odorous sample detection was obtained with south prevailing wind comprising 65.0% of the monitoring time period. In general, it is concluded that OP-FTIR operated with multiple paths simultaneously shall be considered for investigation on relatively complicated episodes such as emergency of chemical release, multiple-source emission and chemical monitoring for odor in a densely populated plant area to enhance the efficacy of OP-FTIR monitoring.

MATERIALS
Product Number
Brand
Product Description

Sigma-Aldrich
Butyl acetate, anhydrous, ≥99%
Sigma-Aldrich
Butyl acetate, ACS reagent, ≥99.5%
Sigma-Aldrich
Butyl acetate, suitable for HPLC, 99.7%
Sigma-Aldrich
Butyl acetate, natural, ≥98%, FG
Supelco
Butyl acetate, analytical standard
Sigma-Aldrich
Butyl acetate, ≥99%, FCC, FG
Sigma-Aldrich
Butyl acetate, ReagentPlus®, 99.5%
Sigma-Aldrich
Butyl acetate, puriss. p.a., ACS reagent
Supelco
Butyl acetate, Pharmaceutical Secondary Standard; Certified Reference Material