Fused-silica focusing lens for deep UV laser processing.

Applied optics (1992-08-01)
T Y Hung, C S Su
RESUMO

A simple four-element fused-silica lens is presented that has a focal length of 31.2 mm and a relative aperture of f/1 for use as a focusing lens for deep UV laser processing. The curvature of the lens is designed with a practical design method to match the curvature of existing optical tools. By applying an 8.5-mm beam diameter Nd:YAG laser at a wavelength of 266 nm through the lens, we can easily achieve the percussion drilled into samples of 25-microm-thick tantalum foil with a hole diameter of <6 microm. When the lens and/or the sample is tilted, the shape of the drilled hole is in agreement with the Gaussian beam spot simulation.

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Tantalum, foil, 10mm disks, thickness 0.05mm, annealed, 99.9%
Tantalum, foil, 10mm disks, thickness 0.075mm, annealed, 99.9%
Tantalum, foil, 10mm disks, thickness 0.100mm, annealed, 99.9%
Tantalum, foil, 10mm disks, thickness 0.125mm, annealed, 99.9%
Tantalum, foil, 10mm disks, thickness 0.15mm, annealed, 99.9%
Tantalum, foil, 10mm disks, thickness 0.20mm, annealed, 99.9%
Tantalum, foil, 10mm disks, thickness 0.25mm, annealed, 99.9%
Tantalum, foil, 10mm disks, thickness 0.25mm, annealed, 99.99%
Tantalum, foil, 10mm disks, thickness 0.5mm, annealed, 99.9%
Tantalum, foil, 10mm disks, thickness 0.75mm, annealed, 99.9%
Tantalum, foil, 15mm disks, thickness 0.006mm, 99.9%
Tantalum, foil, 15mm disks, thickness 0.0075mm, 99.9%
Tantalum, foil, 15mm disks, thickness 0.009mm, 99.9%
Tantalum, foil, 15mm disks, thickness 0.0125mm, 99.9%
Tantalum, foil, 15mm disks, thickness 0.015mm, 99.9%
Tantalum, foil, 15mm disks, thickness 0.01mm, 99.9%
Tantalum, foil, 15mm disks, thickness 0.025mm, as rolled, 99.9%
Tantalum, foil, 15mm disks, thickness 0.02mm, 99.9%
Tantalum, foil, 15mm disks, thickness 0.034mm, as rolled, 99.9%
Tantalum, foil, 15mm disks, thickness 0.03mm, as rolled, 99.9%
Tantalum, foil, 15mm disks, thickness 0.05mm, annealed, 99.9%
Tantalum, foil, 15mm disks, thickness 0.075mm, annealed, 99.9%
Tantalum, foil, 15mm disks, thickness 0.100mm, annealed, 99.9%
Tantalum, foil, 15mm disks, thickness 0.125mm, annealed, 99.9%
Tantalum, foil, 15mm disks, thickness 0.15mm, annealed, 99.9%
Tantalum, foil, 15mm disks, thickness 0.20mm, annealed, 99.9%
Tantalum, foil, 15mm disks, thickness 0.25mm, annealed, 99.9%
Tantalum, foil, 15mm disks, thickness 0.25mm, annealed, 99.99%
Tantalum, foil, 15mm disks, thickness 0.5mm, annealed, 99.9%
Tantalum, foil, 15mm disks, thickness 0.75mm, annealed, 99.9%

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