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496863

Pentakis(dimethylamino)tantalum(V)

99.99%

1 of 1 reviewers took part in a promotion

Synonym(s):

PDMAT, TADMA, Ta(NMe2)5, Tantalum dimethylamide

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Size/SKUAvailabilityPrice
5 g

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$309.00

About This Item

Linear Formula:
Ta(N(CH3)2)5
CAS Number:
Molecular Weight:
401.33
NACRES:
NA.23
PubChem Substance ID:
UNSPSC Code:
12352103
MDL number:

$309.00


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Quality Segment

assay

99.99%

reaction suitability

core: tantalum, reagent type: catalyst

mp

100 °C (dec.) (lit.)

SMILES string

CN(C)[Ta](N(C)C)(N(C)C)(N(C)C)N(C)C

InChI

1S/5C2H6N.Ta/c5*1-3-2;/h5*1-2H3;/q5*-1;+5

InChI key

VSLPMIMVDUOYFW-UHFFFAOYSA-N

General description

Atomic number of base material: 73 Tantalum

Features and Benefits

Volatile solid CVD precursor to tantalum nitride (TaN) thin films. Also yields tantalum oxide (Ta2O5) thin films when O2, H2O, NO or H2O2 is present during the deposition process. Ta2O5 thins films show promise as gate dielectric materials in the manufacture of integrated circuits.

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This Item
668990521280669008
description

99.99%

description

packaged for use in deposition systems

description

99%, ≥99.99% trace metals basis

description

packaged for use in deposition systems

assay

99.99%

assay

≥99.99% (trace metals analysis)

assay

≥99.99% trace metals basis

assay

99.999% (trace metals analysis)

mp

100 °C (dec.) (lit.)

mp

-

mp

-

mp

-

reaction suitability

reagent type: catalyst, core: tantalum

reaction suitability

core: tantalum

reaction suitability

core: tantalum, reagent type: catalyst

reaction suitability

core: titanium

Quality Level

100

Quality Level

100

Quality Level

200

Quality Level

100


Pictograms

FlameCorrosion

Signal Word

Danger

Hazard Codes

Storage Class

4.3 - Hazardous materials which set free flammable gases upon contact with water

WGK

WGK 3

Flash Point (°F)

Not applicable

Flash Point (°C)

Not applicable

PPE (personal protective equipment)

Eyeshields, Faceshields, Gloves, type P3 (EN 143) respirator cartridges

Hazard Classifications

Eye Dam. 1 - Flam. Sol. 1 - Skin Corr. 1B - Water-react. 1



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1 of 1 reviewers took part in a promotion

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