648663
Bis(ethylcyclopentadienyl)ruthenium(II)
Synonym(s):
Diethylruthenocene
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| Size/SKU | Availability | Price |
|---|---|---|
2 g | Available to ship TODAYfromMILWAUKEE | $429.00 |
About This Item
Quality Segment
form
liquid
composition
Ru, 33.9-36.4% gravimetric
reaction suitability
core: ruthenium, reagent type: catalyst
refractive index
n20/D 1.5870 (lit.)
bp
100 °C/0.01 mmHg (lit.)
mp
6 °C (lit.)
density
1.3412 g/mL at 25 °C (lit.)
storage temp.
−20°C
SMILES string
[Ru].CC[C]1[CH][CH][CH][CH]1.CC[C]2[CH][CH][CH][CH]2
InChI
1S/2C7H9.Ru/c2*1-2-7-5-3-4-6-7;/h2*3-6H,2H2,1H3;
InChI key
VLTZUJBHIUUHIK-UHFFFAOYSA-N
General description
Application
- A precursor to synthesize ruthenium films via the atomic layer deposition (ALD) method.
- A precursor to synthesize ruthenium thin films on substrates such as SiO2 via plasma enhanced atomic layer deposition (PEALD) method.
- A metal-organic precursor in the chemical vapor deposition (CVD) process to deposit ruthenium (Ru) thin films suitable for applications like capacitor electrodes in microelectronics.
- A precursor to prepare ultrathin ruthenium (Ru) films via the atomic layer deposition (ALD) and selective etching techniques.
Features and Benefits
- High Volatility: Suitable for gas-phase delivery in Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD).
- Thermal Stability: Stable under typical ALD/CVD processing temperatures
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This Item | |||
|---|---|---|---|
| description - | description - | description - | description 99.5 atom % D |
| form liquid | form liquid | form - | form liquid |
| composition Ru, 33.9-36.4% gravimetric | composition - | composition W, 43.8-48.0% gravimetric (, with Cinchonine) | composition - |
| density 1.3412 g/mL at 25 °C (lit.) | density 1.516 g/mL at 25 °C (lit.) | density - | density 1.253 g/mL at 25 °C (lit.) |
| mp 6 °C (lit.) | mp - | mp - | mp 6 °C (lit.) |
| storage temp. −20°C | storage temp. - | storage temp. - | storage temp. - |
| refractive index n20/D 1.5870 (lit.) | refractive index - | refractive index n20/D 1.6 (lit.) | refractive index n20/D 1.5498 (lit.) |
Signal Word
Warning
Hazard Codes
Precautionary Statements
Hazard Classifications
Eye Irrit. 2 - Skin Irrit. 2 - STOT SE 3
Target Organs
Respiratory system
Storage Class
10 - Combustible liquids
WGK
WGK 3
Flash Point (°F)
>199.9 °F - closed cup
Flash Point (°C)
> 93.3 °C - closed cup
PPE (personal protective equipment)
Eyeshields, Gloves, type ABEK (EN14387) respirator filter
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